Items where Author is "Smith, S"

Article

Schiavone, G and Murray, J and Smith, S and Desmulliez, M P Y and Mount, A R and Walton, A J (2016) A wafer mapping technique for residual stress in surface micromachined films. Journal of Micromechanics and Microengineering, 26 (9). 095013. ISSN 0960-1317