Items where Author is "Herder, J L"
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de Laat, M L C and PĂ©rez Garza, H H and Herder, J L and Ghatkesar, M K (2016) A review on in situ stiffness adjustment methods in MEMS. Journal of Micromechanics and Microengineering, 26 (6). 063001. ISSN 0960-1317